Re: Is ceramic plasma coating parts good for carbon sputter deposition


Posted by Gordon England on January 25, 2003 at 14:31:59:

In Reply to: Is ceramic plasma coating parts good for carbon sputter deposition posted by cc lim on January 24, 2003 at 10:19:11:

: Hi,
: We have some problem on carbon particle flake from normal AlO thermal coating during sputtering take place in an high vacuum chamber. Therefore would like to know if ceramic coating will be good for carbon deposition especially to those high energy carbon sputter process as DLC. Besides, I would like to know what type of ceramic material that will strongly recomment in this case.

: best regards.....CC

Thank you for being the first to post a message.

Can you give us more background on this. What is the purpose for coating alumina? Is alumina coating in the as-sprayed condition or finished by grinding prior to carbon coating.

Regards Gordon


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